V105: 
IQ3-IQT3 Pro EtherNetIP EDS v105 zip file
IQ3-IQT3 Pro PROFINET GSDML v105 zip file 

V104:

IQ3-IQT3 Pro EtherNetIP EDS v104 zip file
IQ3-IQT3 Pro PROFINET GSDML v104 zip file

V103:
IQ3-IQT3 Pro PROFINET GSDML V 103 zip file

IQ3-IQT3 Pro EtherNetIP EDS V103 zip file

Download the Integrated Ethernet Actuator - EtherNet/IP EDS File Version instructions